CVD Silicon Carbide Coating MOCVD Susceptor

Short Description:

VET Energy SiC Coated MOCVD Susceptor is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.

 

 

 

 


  • Place of Origin: Zhejiang, China (Mainland)
  • Model Number: Boat3002
  • Chemical Composition: SiC coated graphite
  • Electrical Resistivity: 11 μΩm
  • Shore Hardness: 58
  • Thermal Conductivity: 116 W/mK (100 kcal/mhr-℃)
  • Sample: Avaliable
  • HS Code: 6903100000
  • Brand Name: VET
  • Density: 1.85 g/cm3
  • Flexural Strength: 49 MPa
  • Ash: <5ppm
  • Quality: Perfect
  • Application: Semiconductor /Photovoltaic
  • Product Detail

    Product Tags

    The VET Energy SiC Coated MOCVD Susceptor is a high-performance product engineered for consistent and reliable performance in wafer processing applications. Featuring a superior SiC coating, it offers exceptional heat resistance, thermal uniformity, and corrosion resistance. Ideal for MOCVD equipment, this silicon carbide coated susceptor ensures optimal wafer growth and extended equipment lifespan.

    susceptor

    Product Features:

    1. High-temperature oxidation resistance up to 1700℃: Our SiC coating provides exceptional thermal stability, even in the most demanding MOCVD environments.

    2. High purity and thermal uniformity: The silicon carbide susceptor guarantees minimal impurities and consistent heating across the wafer, ensuring superior crystal quality.

    3. Excellent corrosion resistance: Resistant to acids, alkalis, salts, and organic reagents, our susceptor maintains its integrity in various chemical environments.

    4. High hardness, dense surface, and fine particles: These properties contribute to a longer service life and enhanced durability.

    1

    Our CVD silicon carbide coated Product Benefits and Applications

    MOCVD susceptors deliver significant advantages in semiconductor manufacturing. The SiC coating enhances wafer quality, reduces defects, and optimizes production efficiency. VET Energy supplies a wide range of silicon carbide products tailored to the specific needs of the semiconductor and photovoltaic industries.

     

    Product Customization and Technical Support

    As a leading manufacturer of silicon carbide and graphite products, VET Energy offers customized solutions with various coatings like SiC, TaC, glassy carbon, and pyrolytic carbon. Our experienced team can provide expert guidance and support for your specific application.

    284

    Warmly welcome you to visit our factory, let's have further discussion!

    研发团队

     

    生产设备

     

    公司客户

     

     


  • Previous:
  • Next:

  • WhatsApp Online Chat !