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1. Main processes of plasma enhanced chemical vapor deposition
Plasma enhanced chemical vapor deposition (PECVD) is a new technology for the growth of thin films by chemical reaction of gase...
Currently, silicon carbide (SiC) is a thermally conductive ceramic material that is actively studied at home and abroad. The theoretical thermal conductivity of SiC is very high, and some crystal f...
The core technology for the growth of SiC epitaxial materials is firstly defect control technology, especially for defect control technology that is prone to device failure or reliability degradati...
The first generation of semiconductor materials is represented by traditional silicon (Si) and germanium (Ge), which are the basis for integrated circuit manufacturing. They are widely used in low-...
Semiconductor device production mainly includes discrete devices, integrated circuits and their packaging processes.
Semiconductor production can be divided into three stages: product body materia...