1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...
SiC/SiC has excellent heat resistance and will replace superalloy in the application of aero-engine
High thrust-to-weight ratio is the goal of advanced aero-engines. However, with the increase of t...
Sichuan Province is vast in area and rich in mineral resources. Among them, the prospecting potential of emerging strategic resources is huge. A few days ago, it was led by Sichuan Natural Resourc...
Non-uniformity of ion bombardment
Dry etching is usually a process that combines physical and chemical effects, in which ion bombardment is an important physical etching method. During the etchin...
As global aluminum processing lines continue to move toward higher temperatures, longer continuous production, and fewer maintenance shutdowns, ensuring that graphite degassing rotors remain stable...
① It is a key carrier material in the production process of photovoltaic cells
Among silicon carbide structural ceramics, the photovoltaic industry of silicon carbide boat supports has developed at...